Clean Track Lithius Energy Equipment & Supplies

1 equipment items found

Clean Track Lithius - Model Pro AP - Wafer Processing System

Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN

CLEAN TRACK™ LITHIUS Pro™ AP for 300mm wafer processing system incorporates fundamental concepts from the widely-installed CLEAN TRACK™ ACT™ 12, with increased focus on providing optimized hardware and processes to support advanced packaging, high viscosity, and spin-on hard mask applications. Additionally, this platform integrates the latest transfer system with alignment ...

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